超低功率熱致動振盪器及其驅動電路14/961,252

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

14/961,252

專利證號

US 9,621,105 B2

專利獲證名稱

超低功率熱致動振盪器及其驅動電路14/961,252

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2017/04/11

技術說明

熱致動振盪器係利用溫度以轉換成驅動力，隨著製程技術的進步並藉由元件體積的微縮，使得熱時間常數能有效縮短以跟上機械共振頻率，然而在理論上熱致動振盪器雖可利用本身結構內部的熱、機、電耦合效應以自激振盪且降低功率需求，但目前文獻中尚未見聞如何實現一個超低功耗的熱致動振盪器的解決方案。本發明係揭露一種超低功率熱致動振盪器及其驅動電路，超低功率熱致動振盪器包含質量塊、熱致動元件及複數個驅動件。質量塊為對稱配置且由彈簧結構懸空連接於基板上。熱致動元件為線結構以提升驅動阻抗，熱致動元件與質量塊或彈簧結構相連接。複數個驅動件則分別設置在熱致動元件兩側以提供驅動電流。當驅動電流流經熱致動元件時，使熱致動元件產生變形，以驅動質量塊產生振盪。再者，藉由線結構的熱致動元件的設計可以有效減低驅動功率需求及降低雜散電容的影響。 An ultra low power thermally-actuated oscillator and driving circuit thereof are provided. The ultra low power thermally-actuated oscillator includes proof masses, thermally-actuated element and a plurality of driving elements. The proof masses is symmetrically disposed and suspended from a substrate by spring structure. The thermally-actuated element is a line structure to effectively reduce the motional impedance and direct current power. Wherein, the thermally-actuated element is connected to the proof masses or the spring structure. The plurality of driving elements are respectively disposed on both sides of the thermally-actuated element to provide a driving current. When the driving current flows through the thermally-actuated element, the thermally-actuated element will be deformed and thus the proof masses will be driven to produce a harmonic oscillation.

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