具有應力隔絕結構之慣性感測器

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

100144101

專利證號

I 461692

專利獲證名稱

具有應力隔絕結構之慣性感測器

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2014/11/21

技術說明

一種具有應力隔絕結構之慣性感測器，包含有一基材、一懸橋、一保護環以及一機電轉換結構。該基材具有一容槽及一圍繞該容槽的環壁，該懸橋設於該容槽內，並與該環壁連接，該保護環與該懸橋連接而懸吊於該容槽內，且該懸橋介於該基材與該保護環之間，而該機電轉換結構與該保護環連接，且受該保護環的圍繞。據此，本發明藉由該保護環的設置，降低環境外力對該機電轉換結構的干擾，可增進該慣性感測器的精準度及降低元件後續封裝製程對其性能所造成的影響，故可進一步簡化整體封裝、測試及校準程序而降低生產成本。 A inertial sensor with stress isolation structure, which includes a substrate, a suspending bridge, a guard ring and a electro-mechanical transformation structure. The structure has a recess and a surrounding wall encompassing the recess. The suspending bridge is disposed in the recess and connected with the surrounding wall. The guard ring is connected with the suspending bridge and suspended in the recess, and the suspending bridge is located between the substrate and the guard ring. The electro-mechanical transformation structure which is connected with the guard ring is surrounded by the guard ring. By means of installing the guard ring, the disturbance caused by the external force from the environment is reduced, the precision of the inertial sensor is improved, and the influence of the packaging process on the performance of the sensor is reduced. Furthermore, the packaging process, the testing, and the correct process are simplified so as the production cost is lowered.

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