量測平台之漣波驅動系統及其方法THRUST RIPPLE MAPPING SYSTEM IN A PRECISION STAGE AND METHOD THEREOF

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

13/775,813

專利證號

US 9,331,624 B2

專利獲證名稱

量測平台之漣波驅動系統及其方法THRUST RIPPLE MAPPING SYSTEM IN A PRECISION STAGE AND METHOD THEREOF

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2016/05/03

技術說明

目前常用於一維或二維之線性馬達常存在其推力具有力連波之現象，此為線性馬達先天具有之缺陷，其產生原因眾多，因此較難以逐一消除。同時在線性馬達為推力來源之精密平台上，因為此力漣波所造成的推力不均勻，經常會造成精密平台定位不佳，或是造成控制上補償的困難。本專利目的在提出一可量測二維推力的量測系統，同時可利用此系統所量測得之推力平面達成推力補償。1.以簡易之導螺桿及線性滑軌即可完成本量測系統架構。2.利用市售荷重元即可精確量測到線性馬達推力不均勻所產生之力漣波。3.可搭配導螺桿及線性滑軌完成推力量測系統之自動化，且針對不同尺寸的平台，其量測範圍可以導螺桿及線性滑軌自由調配。4.對於一維及二維之精密平台系統均適用。 Linear motors currently used in one or two dimensions of the phenomenon often present with its thrust force even the waves, this is a linear motor with a congenital defect, which produces a number of reasons, it is more difficult to eliminate one by one. Meanwhile precision linear motors on the platform thrust of sources, because the thrust force ripple caused by this uneven, often resulting in poor precision platform positioning, or cause difficulties compensation control. The purpose of the patent can be measured in a proposed two-dimensional thrust measurement systems, and can take advantage of this system is measured by the amount of thrust as the plane reached thrust compensation.

備註

本部(收文號1100075104)同意該校110年12月24日校研發字第1100095825號函申請終止維護專利(台大)

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