共光程抗傾角之多光束干涉裝置

專利類型

新型

專利國別 (專利申請國家)

中華民國

專利申請案號

102206501

專利證號

M 459393

專利獲證名稱

共光程抗傾角之多光束干涉裝置

專利所屬機關 (申請機關)

國立雲林科技大學

獲證日期

2013/08/11

技術說明

一種共光程抗傾角之多光束干涉系統，其設有一光源、一干涉儀組及一訊號處理組，該干涉儀組係接收光源且設有一玻璃平板及一角隅稜鏡，該玻璃平板係設有一鍍膜，該角隅稜鏡係接收玻璃平板的透射光束及鍍膜的反射光束，該訊號處理組係設有一分光鏡、一位置靈敏檢測器及一光強檢測器，該分光鏡係接收玻璃平板及角隅稜鏡間所產生的干涉條紋並將其均分為兩道光束，該位置靈敏檢測器係用以接收其中一光束，而該光強度檢測器係接收另一道光束，藉以進行干涉訊號的檢測，進而提供一可抗傾角影響且可準確檢測的共光程抗傾角之多光束干涉系統者。 A multiple-beam interferometric system that consists of a light source, an interferometer and a signal process module possess the characteristics of common optical path and independence of the tilt angle. The light beam is incident to interferometer. In the interferometer, there are a coated glass plate and a corner cube where transmission and reflection beams from glass plate can be received. In the signal process module, there are a beam splitter, a position sensitive detector (PSD) and a photodiode. The interference beam that results from beams superposition between the glass plate and the corner cube is divided into two beams by the beam splitter. One of the two beams will be detected by PSD and the other by the photodiode. With the two detectors, the interference signals can be detected. By the multiple-beam interferometric system, a precision displacement measurement can be realized under conditions of common optical path and independence of the tilt angle.

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