線型多波長共焦顯微鏡模組以及線型多波長共焦顯微方法與系統SLIT-SCAN MULTI-WAVELENGTH CONFOCAL LENS MODULE AND SLIT-SCAN MICROSCOPIC SYSTEM AND METHOD USING THE SAME

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

12/691,803

專利證號

US 8,773,757 B2

專利獲證名稱

線型多波長共焦顯微鏡模組以及線型多波長共焦顯微方法與系統SLIT-SCAN MULTI-WAVELENGTH CONFOCAL LENS MODULE AND SLIT-SCAN MICROSCOPIC SYSTEM AND METHOD USING THE SAME

專利所屬機關 (申請機關)

國立臺北科技大學

獲證日期

2014/07/08

技術說明

本發明提供線型多波長共焦顯微系統，其係利用兩個以上之色差透鏡，使一線入射光場產生色散而使不同波長聚焦於不同之位置。本發明更利用具有線掃描共焦原理及光源色散技術之該線型多波長共焦顯微鏡模組，以具有光學切片能力之共焦顯微技術，配合光譜色散之高解析，發展長景深高解析之光學微形貌輪廓量測技術與系統。本發明之方法與系統利用寬頻之線光源，藉由該色散物鏡模組，使寬頻光源產生軸向色散並聚焦在不同深度，同時獲得聚焦表面反射光譜，經由狹縫進行空間濾波由線光譜影像感測單元精確偵測出光譜聚焦反應曲線之峰值位置，可精確且快速地完成剖面輪廓量測。 The present invention provides a slit-scan multi-wavelength confocal lens module (objective) which utilizes at least two lenses having chromatic aberration for splitting a broadband light field into continuously linear spectral lights having different focal points respectively. The present invention further utilizes the chromatic confocal lens module employing slit-scan confocal principle and chromatic dispersion techniques and the confocal microscopy having good capability of optical sectioning and high resolution of spectral dispersion to establish a confocal microscopy method and system having a long depth of field (DOF) and high resolution. The system and method modulate a broad band light field to produce the axial chromatic dispersion and focus on different depths toward a measured object’s surface and then obtain the reflected light spectrum from the surface. The 3D surface profile can be measured and reconstructed on-line accurately.

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專利技轉組

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02-87720360

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