角隅稜鏡式偏振光干涉系統Polarization interferometer system with the corner cube

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

099100913

專利證號

I 399518

專利獲證名稱

角隅稜鏡式偏振光干涉系統Polarization interferometer system with the corner cube

專利所屬機關 (申請機關)

國立雲林科技大學

獲證日期

2013/06/21

技術說明

一種角隅稜鏡式偏振光干涉系統，設有一光源組、一干涉組及一訊號處理組，該光源組係設有一光源，該干涉組係接收光源並設有一偏振分光鏡、一鍍膜玻璃平板、一反射鏡、一四分之一波片及一角隅稜鏡，該訊號處理組係接收干涉組的光束並設有一分光鏡、兩位置靈敏檢測器及一類比訊號處理模組，該分光鏡係接收經偏振分光鏡反射所產生的干涉條紋並將其均分為兩道光束，而兩位置靈敏檢測器係分別接收兩道光束，該類比訊號處理模組係與兩位置靈敏檢測器連接並對於干涉訊號進行檢測以應用於位移量測，進而提供一共光程且具抗傾角效果的角隅稜鏡式偏振光干涉系統者。 A polarization interferometer system with the corner cube is proposed. The system consists of a light source module, an interferometer mirror module and a signal processing module. The interferometer mirror module which includes a polarization beam splitter, a coating plane mirror, a reflection mirror, a quarter-wave plate and a corner cube receives laser beam from the light source module. The signal processing module containing a non-polarization beam splitter, two position sensitive detectors and an analog signal processing receives interference signal. The non-polarization beam splitter receives the interference fringe which is divided into two interference fringes with the same intensity. The two interference beams are detected by two position sensitive detectors that are connected with the analog signal processing module. With the procedure, the interference signals can be detected for displacement measurement.

備註

本部(發文號1100061386)同意貴校110年10月6日雲科大研字第1100502212號函申請終止維護專利。(雲科大)

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