發明
中華民國
102117713
I 506661
單鍵驅動雙穩態開關
國立臺灣大學
2015/11/01
一種單鍵驅動雙穩態開關,包括致動器、連接該致動器且具有槓桿長端及槓桿短端的槓桿機構、連接至該槓桿短端的雙穩態機構、以及連接至該槓桿長端的位移放大機構,其中,該雙穩態機構及該位移放大機構大致呈平行設置,且該位移放大機構具有驅動部,並鄰近該雙穩態機構的被驅動部。據此,本發明之單鍵驅動雙穩態開關僅需由單一致動器驅動,能有效地降低元件尺寸同時提高製程良率,並降低雙穩態開關操作之複雜度,達成單鍵切換之功效,更藉由位移放大機構及槓桿機構,將致動器之位移量放大,進一步提升節能效果。 This work presents a novel MEMS bistable device that requires only one independent driving source for switching between its two stable states. The proposed device employs a mechanically push-on-push-off mechanism consisting of two curved beam structures. An integrated V-beam actuator is used as the only actuation component. The proposed device can be easily realized on an SOI wafer by using the ICP-RIE process with a single photomask. In addition, the device is desirable for many applications requiring bistable micro-mechanisms, simply because the numbers of contact pads, leads, and external power sources can be effectively reduced.
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