利用掃描式同調光繞射的三維顯影方法及系統

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110147201

專利證號

I 782822

專利獲證名稱

利用掃描式同調光繞射的三維顯影方法及系統

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2022/11/01

技術說明

一種利用掃描式同調光繞射的三維顯影方法及系統中，二維光偵測器偵測由光源以掃描方式朝向待測樣品的單一面向發射的同調光束經繞射而產生的多個二維繞射資料分布；處理器將該等二維繞射資料分布轉換成在倒空間的多個三維強度分布，根據樣品函數、光源函數和該等三維強度分布進行多次迭代演算以獲得相位回復的樣品函數，並根據該相位回復的樣品函數並執行三維繪圖應用程式生成該待測樣品的三維重建影像，藉此實現相對容易、省時且對該待測樣品所遭受之光照射損害降至最低的三維影像重建。 In a three-dimensional imaging method and system using scanning-type coherent diffraction, a two-dimensional light detector detects a plurality of two-dimensional diffraction data distributions created by the diffraction of a coherent beam emitted from a light source in a scanning manner toward a single face of a sample to be tested; and a processor converts the two-dimensional diffraction data distributions into multiple three-dimensional intensity distributions in the reciprocal space, performs multiple iterations based on the sample function, the light source function and the three-dimensional intensity distributions to obtain the phase-retrieval sample function, and executes the three-dimensional graphing application based on the phase-retrieval sample function to generates a three-dimensional reconstruction image of the sample to be tested, thereby realizing relatively easy, time-saving, and minimal light damage to the sample.

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