薄膜節流器及液靜壓軸承模組

專利類型

發明

專利國別 (專利申請國家)

大陸

專利申請案號

201710590961.6

專利證號

3711355

專利獲證名稱

薄膜節流器及液靜壓軸承模組

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2020/03/06

技術說明

一種薄膜節流器，適於連接於一泵及一軸承，軸承適於配置在一滑軌上，泵適於供應一流體經薄膜節流器流至軸承與滑軌之間，薄膜節流器包括一殼體及一薄膜。殼體包括一腔室、連通於腔室的一入口與一出口、以及一節流面，其中泵適於連接於入口，軸承適於連接於出口。薄膜位於腔室，節流面為殼體在靠近出口且朝向薄膜的一內表面。薄膜的無因次剛性為Kr*，且1.33≦Kr*≦2。Kr*=KrL0/(psAr)，Kr為薄膜的剛性，L0為泵未啟動時薄膜與節流面之間的距離，又稱薄膜組裝間隙，ps為泵所供應的液壓，Ar為節流面的等效面積。本發明更提供具有上述薄膜節流器的一種液靜壓軸承模組。 A membrane restrictor adapted for connecting to a pump and a bearing disposed at a rail is provided. The pump is adapted to supply fluid to a position between the bearing and the rail through the membrane. The membrane restrictor includes a casing and a membrane. The casing has a chamber, an inlet and an outlet connected through the chamber, and a restricting plane. The pump is adapted to connect the inlet, and the bearing is adapted to connect the outlet. The membrane is disposed in the chamber. The restricting plane is an inner surface of the casing near the outlet and towards the membrane. Dimensionless stiffness of the membrane is Kr*, 1.33≦Kr*≦2, wherein Kr*=KrL0/(psAr), Kr is stiffness of the membrane, L0 is a distance between the membrane and the restricting plane when no fluid is supplied by the pump (that is assembled clearance of the membrane), ps is pressure supplied by the pump, and Ar is an effective area of the restricting plane. A hydrostatic bearing module having the membrane restrictor is further provided.

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