METHOD AND SYSTEM FOR ON-LINE REAL-TIME MEASURING THE SURFACE TOPOGRAPHY AND OUT-OF-PLANE DEFORMATION BY USING PHASE-SHIFTING SHADOW MOIRE METHOD

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

14/065,650

專利證號

US 10,006,761

專利獲證名稱

METHOD AND SYSTEM FOR ON-LINE REAL-TIME MEASURING THE SURFACE TOPOGRAPHY AND OUT-OF-PLANE DEFORMATION BY USING PHASE-SHIFTING SHADOW MOIRE METHOD

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2018/06/26

技術說明

本發明為一種於線上檢測物體表面形貌與平面外變形之光學量測方法與系統，該裝置包括：一光源系統、一參考光柵、一取像系統、一步進馬達、一受測物件及一檢測模組。本發明藉由調整不同的光源入射角度和取像角度，直接使用數位相位移式陰影雲紋法(Digital Phase-Shifting Shadow Moiré Method)系統量測未經表面處理(如噴漆處理)之透明或非透明物件之表面形貌與平面外變形，並搭配影像校正，可將非物件法線方向上所擷取之歪斜影像校正為正面影像，以精確獲得實際物件之表面形貌與平面外變形。 The present invention is directed to a system and method for on-line inspection of the surface topography and out-of-plane deformation of transparent materials with phase-shifting shadow moiré method. The system comprises: a light source; a reference grating; an image acquisition equipment; a stepping motor; a testing specimen; a detecting module is used for getting the surface topography and out-of-plane deformation. Digital Phase-Shifting Shadow Moiré Method is applied to a system, which receives the reflected images from the surface without treatment (e.g. painting) of transparent or non-transparent plate projected under a light beam passing through a grating. Next, by image correction program, the skewed interference fringe pattern is recovered to the image as if the image acquisition equipment is placed normal to the surface. Furthermore, the received images are processed with phase-shifting to show the surface topography of the plate.

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