石英振盪器的製作方法與結構

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110104072

專利證號

I 763298

專利獲證名稱

石英振盪器的製作方法與結構

專利所屬機關 (申請機關)

國立陽明交通大學

獲證日期

2022/05/01

技術說明

一種石英震盪器的製作方法，包含一於壓電基板上形成第一電極部的第一電極部製作步驟、一將暫時基板貼合於壓電基板另一面的貼合步驟、一將壓電基板薄化形成薄化壓電基板的薄化步驟、一於薄化壓電基板反向第一電極部的一面形成第二電極的第二電極製作步驟、一自第一電極部延伸至另一面以形成延伸電極的延伸電極製作步驟，及一將中空框架設置於薄化壓電基板的框架設置步驟。通過在整體厚度相同的薄化壓電基板上形成電極，不會因表面具有厚度差而毀損，更有利於電極的製作，進而提高產品的良率，還能使石英振盪器具有良好的高頻振盪性及足夠的機械支撐力。　　 A method for manufacturing a quartz oscillator includes the following steps. First step is to deposit a first electrode portion on a piezoelectric substrate. Second step is to attach the quartz to a temporary substrate. Then, the attached piezoelectric substrate will be thinned to the target thickness and a second electrode manufacturing step of forming a second electrode on the side of the thinned piezoelectric substrate opposite to the first electrode portion, and a step that extends from the first electrode portion to the other side. Finially, a frame setting step for setting the hollow frame on the thinned piezoelectric substrate. By forming electrodes on a thin piezoelectric substrate with the same overall thickness, it will not be damaged due to the thickness difference on the surface, which is more conducive to the production of electrodes, thereby improving the yield of the product, and also enables the quartz oscillator to have a good high frequency Oscillation and sufficient mechanical support.