射頻散射參數量測校正方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

099138690

專利證號

I 463146

專利獲證名稱

射頻散射參數量測校正方法

專利所屬機關 (申請機關)

元智大學

獲證日期

2014/12/01

技術說明

本校正方法使用一段傳輸線、一抵補傳輸線之串聯電阻以及一抵補傳輸線之並聯電阻作為標準件，用以進行晶圓探針之微波向量網路分析儀寬頻散射參數量測，而此三個標準件之射頻特性並不需預先得知。串聯電阻件之直流電阻值可精確測得，並據此求得傳輸線特性阻抗。利用此特性阻抗，晶圓待測物之散射參數可用ㄧ階段方式作校正與去嵌化動作，免除使用阻抗標準板（Impedance-Standard-Substrate, ISS）的麻煩。除此之外，此校正法利用串聯電阻件之精確的直流電阻值以及串／並聯電阻件之不同長度的抵補傳輸線，可避免傳輸線標準件相位移接近0度或180度所造成的數值不良問題（ill-conditioned problem），從而得到寬頻量測的特性。 The proposed calibration method utilizes a transmission line, a series-resistor with an offset line, and a shunt-resistor with an offset line as standards for on-wafer broadband scattering-parameter measurements of microwave vector network analyzers, where the RF characteristics of the standards need not to be known. The characteristic impedance of the transmission lines can be evaluated with the precise dc resistance of the series-resistor. With the evaluated characteristic impedance of the line, the proposed method can complete the whole calibration with associated de-embedding processes in one-tier manner for device-under-test (DUT) without usage of impedance-standard-substrate (ISS). In addition, the proposed calibration method takes advantages of the dc resistance and the different lengths of the offset lines for the series/shunt resistor, the ill-conditioned problem can be avoided as the line phase shift approaching zero or 180 degrees, to achieve the broadband feature.

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