레티클 보호막의 총체적 동적 검사 방법 및 총체적 동적 검사 시스템

專利類型

發明

專利國別 (專利申請國家)

南韓

專利申請案號

10-2020-0050386

專利證號

10-2413728

專利獲證名稱

레티클 보호막의 총체적 동적 검사 방법 및 총체적 동적 검사 시스템

專利所屬機關 (申請機關)

南臺學校財團法人南臺科技大學

獲證日期

2022/06/23

技術說明

一種光罩之保護膜的全域動態檢測方法，利用令該保護膜產生寬頻震盪並配合對具有多頻震盪的保護膜施加寬頻訊號，並透過將接收自該保護膜反射的光學時域訊號轉換，而得到具有多個共振頻率之頻譜。最後，再藉由該頻譜檢測該保護膜，可全方位的檢測該保護膜，以更確保該保護膜的品質。此外，本發明還提供一種用於該全域動態檢測方法的全域動態檢測系統。 A global dynamic detection method for a protective film of a photomask includes: causing the protective film to undergo broadband oscillation; applying a broadband signal to the protective film undergoing multi-frequency oscillation; transforming an optical time-domain signal reflecting off the protective film to obtain a frequency spectrum with multiple resonance frequencies; and detecting the protective film with the frequency spectrum comprehensively to ensure the quality of the protective film. A global dynamic detection system for use with the global dynamic detection method is further provided.

備註

連絡單位 (專責單位/部門名稱)

研究發展暨產學合作處

連絡電話

06-2531841

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