電解加工設備及其方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

109116207

專利證號

I 742663

專利獲證名稱

電解加工設備及其方法

專利所屬機關 (申請機關)

國立臺灣師範大學

獲證日期

2021/10/11

技術說明

本發明旨在開發「加速度精密電解加工技術(Acceleration Precision Electro-Chemical Machining, A-PECM)」，目的在成形具有倒錐造型的噴嘴微孔，應用於如生醫方面的藥物塗佈、汽車工業的柴油引擎及半導體產業的濕式蝕刻等的噴嘴用途。為獲得精密的倒錐微孔，本發明提出「加速度精密電解加工技術」電極於微孔內以一固定的加速度，由下而上進給，經由電極進給速度緩增，使微孔孔壁的電場強度由大逐漸變小，故孔壁的金屬溶解率(Metal Dissolution Rate, MDR)隨之緩降，進而創成倒錐微孔。並且，微孔中的電解液採由下而上的方向流動，以維持電解液濃度的一致性，使成形具高一致性孔壁的倒錐微孔。實驗結果顯示，電極以加速度1.0及2.0 m/s2於孔內進給時，可創造出0.09及0.02錐率的倒錐微孔，且微孔的表面粗糙度Ra小於 0.8 m，符合商用(柴油引擎)噴嘴微孔的標準。成形的倒錐微孔接以「二流體噴嘴」進行測試，發現在氣體壓力0.12 MPa及液體壓力0.04 MPa條件下，因錐孔兩端直徑的差異，能使錐率0.02和0.09的微孔分別獲得23°及31°的霧化角度，證實本發明所提出的「加速度精密電解加工法」，著實能成形精密倒錐微孔，此項技術深具商業化價值。 ELECTROLYTIC PROCESSING APPARATUS AND METHOD THEREOF This invention presents the development of an Acceleration Precision Electro-Chemical Machining (A-PECM) technology to create a micronozzle with an inverted tapered microhole which is applied for the pharmaceutical coating in the biomedicine, fuel injector spray in the diesel engine, and wet etching process in the semiconductor industry. The A-PECM process, by which the electrode is fed from the bottom to the top in the hole with a constant and slow acceleration, is conducted on the tabletop micro-electrolytic machining system. The electrode’s feed-rate is gradually increased resulting in the electric field strength of electrolysis is gradually decreased which means the metal dissolution rate (MDR) is gradually reduced, thus creating an inverted tapered microhole. Moreover, the electrolyte maintains the consistency of the electrolyte concentration and flows designed from the bottom to the top of the microhole, thereby produces the microhole with highly uniform hole-wall. Experimental results show that the microholes with the 0.09 and 0.02 inverted taper rate can be precisely finished when using the acceleration of 1.0 and 2.0 m/s2, respectively. The surface roughness with Ra<0.8 m on the hole-wall can be finished which meets the demand for the commercial (diesel engine) nozzle microhole. The formed inverted tapered microholes were tested through a "two-fluid nozzle". It was found that the atomization angles of 23° and 31° can be successfully achieved when using the microholes with an inverted taper rate of 0.02 and 0.09, respectively and the conditions of gas pressure of 0.12 MPa and liquid pressure of 0.04 MPa. It is confirmed that the proposed A-PECM process can indeed form precision inverted tapered microhole, and this technology has great commercial value.

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產學合作組

連絡電話

77341329

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