具取樣率決定機制的量測抽樣方法與其電腦程式產品Measurement sample extraction method with sampling rate decision mechanism, and computer program product therefor

專利類型

發明

專利國別 (專利申請國家)

日本

專利申請案號

特願 2016-105580

專利證號

特許 6285494

專利獲證名稱

具取樣率決定機制的量測抽樣方法與其電腦程式產品Measurement sample extraction method with sampling rate decision mechanism, and computer program product therefor

專利所屬機關 (申請機關)

國立成功大學

獲證日期

2018/02/09

技術說明

盡可能地降低抽測率以減少生產成本對工廠而言至關重要。本團隊先前，已研發一基於全自動虛擬量測的智慧型取樣決策機制來降低抽測率並維持虛擬量測精度。不過，該智慧型取樣決策機制的預期抽測率是固定且手動設定的。因此，當虛擬量測精度變差，該機制無法隨此變化增加原訂之抽測率；這樣一來，需花上更多時間方能收集到足夠樣本來提升精度。而當虛擬量測精度一直保持良好，該機制亦無法適度降低原訂之抽測率，因而導致不必要的量測浪費。為解決上述問題，此專利提出全自動取樣決策機制之概念以便能在線上即時且自動地調整抽測率。當虛擬量測精度變差時，全自動取樣決策機制能即時提升抽測率以恢復量測精度；而當虛擬量測精度保持良好時，全自動取樣決策機制則能自動降低抽測率以節省成本。 Automatic-Virtual-Metrology (AVM) based Intelligent Sampling Decision (ISD) scheme had been previously developed for reducing the sampling rate and sustaining the VM accuracy. However, the desired sampling rate of the ISD scheme is fixed and set manually. Hence, whenever the VM accuracy gets worse, it cannot adoptively increase the default sampling rate in the ISD scheme. Moreover, when the VM accuracy performs well all the time, it cannot automatically decrease the default sampling rate. Accordingly, this patent proposes an Automated Sampling Decision (ASD) scheme to adoptively and automatically modify the sampling rate online and in real time. The ASD scheme can monitor the VM accuracy on line as well as increase the sampling rate to update the VM models in real time for maintaining the VM accuracy when the accuracy becomes poor and can automatically reduce the sampling rate while the VM accuracy performs well.

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06-2360524

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