金屬嵌入光罩及其製造方法METAL-EMBEDDED PHOTOMASK AND MANUFACTURING METHOD THEREOF

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

101134458

專利證號

I 450029

專利獲證名稱

金屬嵌入光罩及其製造方法METAL-EMBEDDED PHOTOMASK AND MANUFACTURING METHOD THEREOF

專利所屬機關 (申請機關)

國立成功大學

獲證日期

2014/08/21

技術說明

一種金屬嵌入光罩之製造方法包含：將至少一金屬材料形成於一基板上，基板具有複數凸部突出於基板之一表面，各凸部具有複數側面及一頂面，該等側面連接頂面與表面，金屬材料形成於頂面及表面；貼附一軟性膜材於基板之頂面；以及使軟性膜材自頂面脫離而將位於頂面之金屬材料部分移除。本發明之金屬嵌入光罩之製造方法製程簡易且大幅降低成本，並且本發明之金屬嵌入光罩之金屬材料不會形成在凸部的頂面，因而避免金屬材料所形成之金屬層與另一基板摩擦，而能延長光罩之使用壽命。 A manufacturing method of a metal-embedded photomask includes the steps of: forming at least one metal material on a substrate that has a plurality of protrusions protruding from a surface of the substrate, wherein each of the protrusions has a top side and a plurality of edge sides connecting the top side and the surface, and the metal material is formed on the top side and the surface; attaching a soft film onto the top sides of the substrate; and separating the soft film from the top sides to remove the metal portion located on the top sides. The manufacturing method of the invention has simple process as well as the reduced cost. Besides, for the metal-embedded photomask of the invention, the metal material is not formed onto the top sides of the protrusions, thereby preventing the metal layer formed by the metal material from rubbing against another substrate so as to elongate the lifespan of the photomask.

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