System and method for identifying root causes of yield loss

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

15/260,343

專利證號

US 10,935,962 B2

專利獲證名稱

System and method for identifying root causes of yield loss

專利所屬機關 (申請機關)

國立成功大學

獲證日期

2021/03/02

技術說明

產品良率直接影響生產成本的多寡，許多廠商都希望能夠在研發及製造過程中快速提升品質與良率，又或是當良率發生異常時，快速找出根本問題，進而達到穩定量產階段來降低成本。蒐集製程資料後進行分析，找出關鍵資訊，透過調整機台參數來穩定製程，是目前提升良率的方式之一。但是資訊蒐集、分析，以至於發現異常問題之連續過程中所浪費的成本，都是造成生產成本提高之因素。因此，本發明提出一套完整良率精進及管理機制，透過資料的收集及分析，並在良率發生問題時，快速找出關鍵影響因子以提升良率，以維持穩定的生產品質，達到降低生產成本之目標。並以TFT-LCD為例，規劃實際執行細節。 Product yield directly affects the amount of the production cost, manufacturers expect to rapidly increase product quality and yield in development and research processes; or, to quickly find out the root-cause when yield abnormalities occur to cost down by reaching stable manufacturing stage. Analyzing and finding out the key information after process and context data collections, and then stabilizing manufacturing processes by adjusting tool parameters is one way of yield enhancement. However, data collection, data analysis, and the cost generated by the continuous process in finding out the abnormalities are all the factors of the cost increases. Therefore, an intact yield enhancement and management scheme is invented to collect and analyze data and find out key factors to enhance the yield when there is an abnormality in order to achieve the goals of stabilizing production quality and cost down.

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