線型彩色共焦顯微系統LINEAR CHROMATIC CONFOCAL MICROSCOPIC SYSTEM

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

13/188,738

專利證號

US 8,599,372 B2

專利獲證名稱

線型彩色共焦顯微系統LINEAR CHROMATIC CONFOCAL MICROSCOPIC SYSTEM

專利所屬機關 (申請機關)

國立臺北科技大學

獲證日期

2013/12/03

技術說明

本發明提供一種線型彩色共焦顯微系統，其係利用兩共軛光纖模組，做為傳導光源產生之偵測光和待測物反射之測物光。藉由兩光纖模組在空間中為互相光學共軛對應之關係，因此光從其中一光纖模組投射至待測物後，反射回來之光即入射至相對應之另一光纖模組上。由於光纖模組內每一條光纖絲將濾除失焦光和雜散光只允許聚焦光通過，達成共軛焦之顯微技術，可大幅降低因光點重疊而產生橫向干擾(cross talk)之雜訊，使得本發明之系統不僅可取得較高深度量測準確度之待測物表面輪廓資訊，同時具有高解析之量測效果。 The present invention provides a chromatic confocal microscope system in which two conjugate fiber modules are spatially configured and respectively employed to conduct a detecting light from a light source and an object light reflected from an object. By means of the two spatially corresponding fiber modules, the detecting light is projected on the object and the reflected light from the object is entered into the other fiber module. Since each fiber of the fiber module is capable of filtering out the unfocused light and stray lights and allowing the focused light passes therethrough, thereby minimizing potential interference of the noise of cross talk caused by the overlapped light spots such that not only can the present invention obtain the information of surface profile of the object with high vertical measurement resolution but also achieve high lateral resolution during confocal measurement.

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