發明
中華民國
103112245
I 642204
發光二極體元件
國立交通大學
2018/11/21
具有電流垂直注入結構之氮化鋁鎵銦發光二級體,因為其利用n-AlGaN/n-GaN磊晶成長形成內建二維電子氣層作為內建電流擴散層,並且利用微米級圖型的上發光面以增加光汲取效率,以及使用AlN/GaN超晶格結構做為機械-化學剝離之蝕刻停止層。高硬度的圖型化藍寶石基板可以用雷射剝離法進行分離,或機械-化學剝離以製作電流垂直注入結構之的氮化鋁鎵銦發光二級體。本電流垂直注入結構之氮化鋁鎵銦發光二級體可發光可為綠光,藍光,紫外光。 An AlGaInN-based vertical-injection LED and methods of making a AlGaInN-based vertical-injection LED with a superior current spreading by embedded two-dimensional electron gas layer made of n-AlGaN/n-GaN hetero-layers, micro-scale patterned top light emitting surface and AlN/GaN superlattices to be the etch-stop stack for mechanical-chemical lift-off. The native inert patterned sapphire substrate can be removed by laser lift-off or mechanical-chemical lift-off in order to be replaced with an electrical-thermal conductive substrate to fabricate a vertical-injection structure LED. The active stack layers of the LED are made of AlGaInN compound semiconductor which can emit green, blue and ultraviolet (UV) light.
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