光柵式樣之量測裝置及方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

104122477

專利證號

I 615602

專利獲證名稱

光柵式樣之量測裝置及方法

專利所屬機關 (申請機關)

國立臺灣科技大學

獲證日期

2018/02/21

技術說明

此為高解析度光學編碼器與光學尺研發的研發成果，以下將做簡單的說明。簡單來說，當一個平面的光或準直光被輻射到一細光柵部，該反射光使衍射光柵的圖像被重複以規則的距離。而這個圖像被稱為自我形象或塔爾博特圖像。此裝置中使用的這種現象來測量線性標尺的質量。而線性標尺的塔爾博特圖像由CMOS照相機和10X物鏡觀察到。而當規模正在朝著通過在OM機動階段，塔爾博特圖像效果會相當完善。像素的亮度的變化將是正弦。線性度的質量將通過統一這兩個曲線和匹配來驗證。 Theoretically, when a plane light or collimated light is radiated to a fine grating part, the reflected light make an images of diffraction grating is repeated at regular distance. This image is called self-image or Talbot image. This apparatus used this phenomenon to measure the quality of linear scale. The Talbot image of linear scale is observed by a CMOS camera and a 10X objective lens. When the scale was moving by a motorized stage under OM, the effect of Talbot image will moved also. The changes of pixel’s intensity will be sinusoidal. The quality of linear scale will be verified by uniformity and matching of these two curves.

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