晶圓傳送裝置

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

101128393

專利證號

I 460810

專利獲證名稱

晶圓傳送裝置

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2014/11/11

技術說明

一種晶圓傳送裝置，包括兩側邊具有V形側凸緣之矩形晶圓載台、載台夾持器以及傳送桿。該傳送桿利用傳送架吸附且固定該矩形晶圓載台，以將該矩形晶圓載台於主腔體及傳送腔體間來回傳送。該載台夾持器包含夾持基座、導螺桿、導引頭以及具有V形夾持槽之至少二夾持頭，其中，當該導螺桿旋轉時，能帶動該導引頭及複數連動桿，以使該夾持頭作動，令該V型夾持槽密合該矩形晶圓載台之V形側凸緣以固定該矩形晶圓載台。本發明之晶圓傳送裝置能使晶圓以更快速、方便及穩固之方式於主腔體和傳送腔體之間來回移動，以避免習知技術中定位偏差之問題，進一步提升晶圓之良率及生產效率。 Disclosed is a wafer transport device, including a rectangular wafer carrier formed with a V-shaped side protruding edge, carrier clamping device, and a transport rod disposed on each of the two sides respectively. The transport rod takes in and secures the rectangular wafer carrier by means of a transport rack to enable the wafer carrier to transport to and fro between a main cavity and a transport cavity. The carrier clamping device includes a clamping base, a guiding screw rod, a guiding head and at least two clamping heads having V-shaped clamping grooves formed therein, wherein the guiding screw rod rotates to relatively move the guiding head and a plurality of relative-moving rods. The device transports wafers at a faster and safer way with greater convenience to prevent displacement and thus increasing good throughput and production efficiency.

備註

本部(收文號1110015008)同意該校111年3月16日校研發字第1110018536號函申請終止維護專利(國立臺灣大學)

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