Method of manufacturing optical component having micro-structures

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

17/160,894

專利證號

US 11,524,472 B2

專利獲證名稱

Method of manufacturing optical component having micro-structures

專利所屬機關 (申請機關)

國立臺灣科技大學

獲證日期

2022/12/13

技術說明

本研究以射出成形製造微型光柵光學元件，整合微振動 (Micro-Vibratile, MV)與變模溫(Varithermo Mold Temperature, VMT)射出成形製程技術。產品幾何尺寸分別探討巨觀(Macro)之非球面成形收縮誤差分析以及微觀(Micro)之微結構成形複製率。MV製程技術是在射出成形週期之充填階段，使用壓電致動器微振動模仁之微結構，使熔膠容易進入微結構提昇複製率。VMT製程技術是在射出成形週期之冷卻階段通入氣體冷卻模穴，降低開模時產品溫度與室溫之差異，減少非球面形狀誤差。不同製程技術之微結構複製率結果，使用MV技術複製率為74.09%，使用VMT技術複製率為72.8%。整合MV_VMT的微振動變模溫射出成形製程技術，有效將微結構複製率提升至82.39%。非球面平均誤差分析結果，使用VMT技術之最小平均形狀誤差為2.99μm。研究已完成將MV_VMT技術整合來製造非球面之微型光柵光學元件。光譜檢測結果有聚焦存在，雜散光(Straylight)比例約為7.6%。 This research aims to fabricate micro-grating optical element (MGOE) by injection molding integrating with micro-vibratile and varithermo mold temperature methods to analyze on the macro scale aspheric form error (Rt) and the micro-grating filling rate (MGFR) in micro scale. The MV method is to drive a PZT actuator vibratile the microstructure core assisted melt polymer into the microstructure during filling stage. The VMT method is to inlet the cool effective air into mold cavity during cooling stage to reduce the difference between de-molding temperature and room temperature. Experimental results show that the MGFR of VMT method can achieve as 72.8% and the MGFR of MV method as 74.09%. Moreover, MV_VMT process can achieve the MGFR as 82.39%. By VMT technique, the macro aspheric surface residue or Rt can achieve as 2.99μm. Results show that the MV_VMT method obtain desired MGOE for optical test. Test result of spectrometer has focusing through with straylight ratio as 7.6%.

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