微型氣象站及其製法MEMS-BASED WEATHER STATION AND THE FABRICATION METHOD OF THE SAME

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

098115509

專利證號

I 400472

專利獲證名稱

微型氣象站及其製法MEMS-BASED WEATHER STATION AND THE FABRICATION METHOD OF THE SAME

專利所屬機關 (申請機關)

國立成功大學

獲證日期

2013/07/01

技術說明

本研究之目的乃是以微機電製程技術為基礎並透過體型微細加工（Bulk Micromaching）分別製作用於量測溫度、濕度、氣壓、風速與風向之感測器，以作為一微型氣象站之應用。其中本研究乃是運用兩面沉積氮化矽（Si3N4）薄膜之矽晶圓作為基材，並因白金（Pt）之穩定性且其本身電阻對溫度線性變化之特性而選擇白金作為感測與加熱之材料，進而透過體型微細加工分別製作出微型溫度計、微懸臂式濕度計、薄膜式氣壓計、熱膜式風速計與微懸臂式風向計，並個別就其感測特性進行測試與觀察，以確實達到微型氣象站之整合與應用。 Utilizing MEMS techniques,we develop a new process for the fabrication of Pt RTDs,cantilever covered with a water absorbent polyimide layer for humidity measurement,four bending-up of cantilevers arranged in a cross-form configuration to determine the flow direction and a platinum hot film flow meter be fabricated to measure flow rate.The temperature measurement is based on the linear resistance variations.The polyimide layer is spun on the cantilever to form a humidity sensing layer.A variation in humidity causes moisture-dependent bending of the micro-cantilever which changes the measured resistance.The same type of micro-cantilevers without spinning on polyimide is used to form a flow meter.It is found that the cantilevers bends upward as a result of the released residual stress induced in the beam.When wind passes over the cantilever beam,a small deformation occurs.Variations in the flow rate can therefore be determined by measuring the changes caused by the beam deflection.

備註

本部(收文號1060027134)同意該校106年4月25日成大研總字第1064500318號函申請終止維護專利

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