多階感測元件

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

104134228

專利證號

I 599764

專利獲證名稱

多階感測元件

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2017/09/21

技術說明

多階感測元件, 可增加感測器之感測範圍, 並提供不同的感測靈敏度, 以對應不同的使用需求. 該元件提供一種多階感測元件，包含一基板、一本體，及一量測單元。本體包括一形成於該基板上且具有一第一空間的第一階本體部，及一形成於該第一階介電部上且具有第二空間的第二階本體部。量測單元包括一形成於該第一階本體部與該第二階本體部之間的第一量測件，及一形成於該第二階本體部而位於該第二空間之上的第二量測件。當對該介電體施加一外力時，以該第二量測件量測該第二階本體部產生的形變，而擠壓該第一階本體部產生形變。 The multistage sensing device enhances sensing range and provides different sensitivities for sensors. This invention provides a multistage sensing device, which includes a substrate, a main body, and a measurement unit. The main body comprises a first stage body portion that formed on the substrate and has a first space, and a second stage body portion that formed on the first stage body portion and has a second space. The measurement unit comprises a first measurement member that formed between the first stage body portion and the second stage body portion, a second measurement member that formed in the first stage body portion and above the second space. The shape of the second stage body portion is deformed by applying an external force on the main body, and further leads the first stage body portion to change its shape.

備註

連絡單位 (專責單位/部門名稱)

智財技轉組

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03-5715131-62219

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