發明
美國
16/600,158
US 11,015,918 B2
OPTICAL DISPLACEMENT SENSING SYSTEM
國立交通大學
2021/05/25
本申請案提出一種以具有梯度的導模共振元件及量測方法來量測位移的變化。 當寬頻光入射導膜共振元件,特定波長光會經由光柵耦合回反射方向,其餘波長光會穿透波導結構。當導膜共振元件具有隨位置而變的光柵週期,每個週期會有相對應的波長光,藉由以上機制,固定光源入射位置,當導膜共振有位移變化,反射共振波長也會發生偏移,觀察共振波長變化量即可達成位移感測之目的。藉由此機制,可以利用梯度導模共振進行各種物理量的量測,如位移、角度、加速度、剪力、扭力等。 The present application proposes a method to measure displacement with gradient guided-mode resonance (GMR) element. When a broadband light is incident on a GMR, a specific wavelength (resonant wavelgngth) will be coupled back to the reflective direction via the grating, and other wavelengths will be transmitted through the GMR. We design a GMR with different grating periods varying with positions, which is termed gradient grating period GMR (GGP-GMR). Hence, when the incident light source is fixed, the reflected wavelength will shift as the GMR is shifted. The amount of shift of the reflected wavelength can be correlated with the amount of change in the displacement. Based on this principle, gradient GMR can be used to measure many physical quantities such as displacement, angle, acceleration, shear force, torque, etc.
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