發明
美國
10/816256
7,036,219 B2
整合性散熱基板及其製作方法
逢甲大學
2006/05/02
鋁金屬為價格低廉、製造容易之良好散熱材料。卻受制於鋁金屬與銅導線之間的絕緣及接 著 必需仰賴高分子介層,因而形成傳熱阻礙。本發明旨在利用鋁金屬的表面處理技術,使其 表 面形成緻密且高度熱傳導的氧化鋁層,用以取代傳統的高分子環氧樹脂層,繼之於其上以 局 部鍍或曝光、顯影、蝕刻的方式被覆銅金屬導線,使銅金屬層能直接與氧化鋁層接觸,因 而 提昇電子及光電元件與鋁金屬基板之間的散熱速率。 Aluminum can be a very good candidate material for heat dissipation substrate of electronic and optoelectronic device due to its low cost, easy fabrication and acceptable thermal conductivity. A polymer interlayer should however be applied as electrical insulation layer and for better copper layer adhesion in a conventional method thereby reducing heat conduction efficiency. A combination is proposed using surface treatment of the aluminum substrate over which a selected area copper coating or photolithographically obtained copper coating is applied. A dense alumina layer is formed on aluminum substrate providing good thermal conductivity and electrical insulation. This consequently offers a direct contact between copper layer and aluminum substrate and improves heat dissipation efficiency.
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