具自動對焦之表面輪廓測量裝置及其測量方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

097151599

專利證號

I 396826

專利獲證名稱

具自動對焦之表面輪廓測量裝置及其測量方法

專利所屬機關 (申請機關)

中原大學

獲證日期

2013/05/21

技術說明

本發明有關於一種具自動對焦之表面輪廓測量裝置，其包含一干涉儀，干涉儀包含一光源，一分光結構設於光源之一側並接收光源所發之光線；一干涉結構設於分光結構下方並接收分光結構所傳輸之光線；一影像感測元件設於分光結構上方並接收分光結構所傳輸之光線之一影像訊號；一控制電路判斷影像訊號之一干涉強度之一最大值，控制電路依據最大值發出一控制訊號；一位移器設於干涉儀之一側，位移器與控制電路電性相接並接收控制訊號。如此可提升干涉儀對焦時的速度與精度，以節省時間而增加量測效率，更可減少表面輪廓測量裝置之生產成本。 In general, high resolution white light interferometers have two vertical axes. One axis is controlled by motor and the other by PZT. The motor controlled axis is used for focusing and the PZT controlled axis is used for vertical scanning. But the system suffers from some defects which affect the measurement efficiency such as high focusing time, short scanning range, and long orientation time. This patent is aimed to develop an auto focusing system in conjunction with high resolution vertical scanning to attain low cost and high measurement speed. In the auto focusing system, we use one photodetector and microcontrollers. The photodetector is used as a sensor for its high response time and high sensitivity to convert the light intensity to its characteristic voltage. One microcontroller is used to detect the real time variation of photodetector output voltage and from the maximum voltage position focus position can be determined precisely. The system can attain the focus position a….

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