PIEZOELECTRIC SENSING MODULE, PIEZOELECTRIC SENSING MODULE DETECTING METHOD, AND PIEZOELECTRIC SENSING DETECTION SYSTEM THEREOF

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

16/136,649

專利證號

US 10,680,163 B2

專利獲證名稱

PIEZOELECTRIC SENSING MODULE, PIEZOELECTRIC SENSING MODULE DETECTING METHOD, AND PIEZOELECTRIC SENSING DETECTION SYSTEM THEREOF

專利所屬機關 (申請機關)

中原大學

獲證日期

2020/06/09

技術說明

一種壓電感測模組、壓電感測模組偵測之方法及其壓電感應偵測系統。壓電感測模組係設置於工具機之作動單元上。壓電感測模組包括壓電感測薄膜，壓電感測薄膜上至少設置包括第一電極、第二電極、第三電極、第四電極、第五電極以及第六電極，其中第一電極位於第三電極及第四電極之間，第二電極位於第五電極及第六電極之間；其中第一電極及第二電極之間、第三電極及第五電極之間與第四電極及第六電極之間皆相隔特定距離，且第一電極及第二電極之間、第三電極及第五電極之間與第四電極及第六電極之間於作動單元上具有90度之夾角。 【英文】 A piezoelectric sensing module, a piezoelectric sensing module detecting method, and a piezoelectric sensing detection system thereof are disclosed. The piezoelectric sensing module is used for an actuating unit of a machine tool. The piezoelectric sensing module includes a piezoelectric sensing film, and the piezoelectric sensing film includes at least a first to a sixth electrodes; wherein the first electrode is disposed between the third and the fourth electrodes, the second electrode is disposed between the fifth and the sixth electrodes; wherein the first and the second electrodes, the third and the fifth electrodes, and the electrode and the sixth electrodes are separated by a certain distance, and an angle between the first and the second electrodes, the third and the fifth electrodes, and the fourth and the sixth electrodes on the actuating unit have an included angle of 90 degrees.

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