一種奈米碳管叢應變感測器及其形成方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

106124678

專利證號

I 646043

專利獲證名稱

一種奈米碳管叢應變感測器及其形成方法

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2019/01/01

技術說明

提供了一個簡單的奈米碳管叢撓性應變感測器製作方法，利用化學氣相沉積法直接在撓性基材上成長同方向性排列之奈米碳管叢，並且於奈米碳管叢兩側通以均勻之電壓，發現本發明之奈米碳管叢撓性應變感測器可在微小外力形變時，就會下有高電阻變化率，使得其有高應變規因子與高感測靈敏度，為一高靈敏度的撓性應變感測器及其製造方法，利用奈米碳管叢直接成長於撓性基材上，製作高靈敏度之應變感測器，可在微小應變下即有高電阻變化率之產生，意即為高靈敏度之撓性應變感測器。 This present invention can be manufactured in a simple process of flexible strain device with aligned carbon nanotube carpets. The sensor allows contact resistance change between VACNTs and metal foil for sensor lengthwise strain. Experimental results show the sensor measures a small strain of 0.0028%. The measured gauge factor of the sensor is 296. The demonstrated technique of flexible sensors shows advantage of high sensitivity and quality, which is beneficial for mass production. A flexible contact-resistance device of VACNTs has large contact resistance varies higher than that of a flexible strain sensor having different substrates and materials, which can be fabricated in a simple process. On the other hand, this invention has a high sensitivity using VACNTs on flexible substrates. Moreover, it can be easily applied onto any kind of substrate for wide applications.

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