光感測器及其製法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110132393

專利證號

I 792529

專利獲證名稱

光感測器及其製法

專利所屬機關 (申請機關)

國立陽明交通大學

獲證日期

2023/02/11

技術說明

一種光感測器的製法，包含在可撓式塑料基板表面形成連續且厚度2至10nm的金屬膜；使用波長808nm且功率密度4至40W/cm2的連續波雷射對金屬膜進行雷射退火處理1至30分鐘，使金屬膜轉變成包含多個可吸收波長400nm至800nm光的金屬奈米粒子的輔助層；在輔助層表面形成金屬氧化物膜；使用波長808 nm且功率密度4至40 W/cm2的連續波雷射對金屬氧化物膜進行雷射退火處理1至60分鐘，使金屬氧化物膜的氧空缺降低並金屬-氧鍵結增加而轉變成為主動層；形成電極單元與主動層連接。該製法所製得的光感測器為可撓式、有良好的可見光及紫外光感測能力且使用壽命長。 This invention provides a manufacturing method of photodetector, comprises following steps：Forming a continuous metal film on the surface of a flexible plastic substrate. Using a continuous wave laser with a wavelength of 808 nm and a power density of 4 – 40 W/cm2 to perform laser annealing treatment on said metal film for 1 - 30 minutes to make said metal film is transformed into an auxiliary layer containing a plurality of metal nanoparticles that can absorb light with a wavelength of 400 – 800 nm. Forming a metal oxide film on the surface of said auxiliary layer. Using a continuous wave laser with a wavelength of 808 nm and a power density of 4 - 40 W/cm2 to perform laser annealing treatment on said metal oxide film for 1 - 60 minutes to reduce the oxygen vacancy and increase said metal-oxygen bond of said metal oxide film to transform into an active layer. Forming an electrode unit to connect with said active layer. The photodetector produced by said manufacturing method is flexible, has good visible light and ultraviolet light sensing capabilities, and has a long life.