可撓式壓力感測裝置

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110131484

專利證號

I 776656

專利獲證名稱

可撓式壓力感測裝置

專利所屬機關 (申請機關)

國立臺灣師範大學

獲證日期

2022/09/01

技術說明

本專利是一種基於靜電紡絲纖維層複合微圓柱陣列的雙結構介電層，並應用於新型高靈敏電容式壓力感測器的製作。整體製程可以透過簡便、快速、低成本且可控制(controllable)微結構的方法來完成，不需要使用複雜、昂貴的設備。所提出的感測器在受壓時可以透過纖維及微圓柱結構的變形來獲得更多的電容變化。它具有0.6 kPa-1的高靈敏度、25 ms的快速響應時間、0.065 Pa的超低檢測限制(Limit of detection, LOD)、10000次以上壓縮循環，以及5000次以上彎曲循環無任何訊號衰減的高耐用性及高可靠性。得益於上述的優秀性能，這個高性能的撓性壓力感測器在脈搏監控、聲學檢測、呼吸監控及身體動作監控的即時測試中都獲得了良好的結果。 In this patent, a dual-layer dielectric layer comprising a layer of electrospun fiber and an array of microcylinders was developed and applied in fabricating a new type of high-sensitivity capacitive pressure sensor. A simple, rapid, low-cost, and controllable microstructured method that did not require complex, expensive equipment was adopted. The proposed sensor can more efficiently detect capacitance changes through changes in the fiber and microcylinder structure when compressed. It has a high sensitivity of 0.6 kPa−1, rapid response time of 25 ms, ultra-low limit of detection of 0.065 Pa, and high durability and high reliability without any signal attenuation after up to 10,000 load/unload cycles and over 5000 bending/unbending cycles. This high-performance flexible pressure sensor yielded favorable results in real-time tests, such as pulse monitoring, acoustic tests, breathing monitoring, and body motion monitoring.

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