發明
美國
16/737,516
US 10,884,193 B2
雙光柵感測器、檢測方法及其製備方法「DUAL GRATING SENSING SYSTEM, DUAL GRATING SENSOR AND DETECTING METHOD THEREOF」
國立中正大學
2021/01/05
本發明係揭露一種具有兩個以上光柵的雙光柵之感測器,用以檢測一待測物之性質,其中雙光柵感測器包含基板、形成於基板上且具有兩個雙面光柵結構之波導層、以及設置於波導層上的上蓋,波導層與上蓋之間形成供待測物流通的流道。當一光線藉由第一雙面光柵結構耦合入波導層,並於波導層中傳遞後,再由第二雙面光柵結構耦合出波導層,使雙光柵感測器藉由耦合出波導層之光線之光強度變化,以檢測待測物之性質。The present invention provides a dual grating sensor having at least two double-sided gratings used to sense the properties of a sample. The dual grating sensor includes a substrate, a waveguide layer which is formed on the substrate and has at least two double-sided grating structures, and a channel chip configured on the waveguide layer, wherein an interval channel is formed between the channel chip and the waveguide layer for the sample flowing through. A light is coupled into the waveguide layer via the first double-sided grating structure, transmitted in the waveguide layer, and coupled out of the waveguide layer via the second double-sided grating structure, such that the properties of the sample can be detected according to the change of the coupling intensity.
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