摻鋁和釔氧化鋅/矽異質接面太陽能電池之製作方法及其轉換效率提升之方式PROCESS FOR MANUFACTURE OF SOLAR CELL WITH HETEROJUNCTION OF AZOY AND SILICON AND PROCESS FOR PROMOTION OF TRANSFORMATION CONVERSION THEREOF

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

099113444

專利證號

I 442591

專利獲證名稱

摻鋁和釔氧化鋅/矽異質接面太陽能電池之製作方法及其轉換效率提升之方式PROCESS FOR MANUFACTURE OF SOLAR CELL WITH HETEROJUNCTION OF AZOY AND SILICON AND PROCESS FOR PROMOTION OF TRANSFORMATION CONVERSION THEREOF

專利所屬機關 (申請機關)

正修學校財團法人正修科技大學

獲證日期

2014/06/21

技術說明

本發明係有關於一種摻鋁和釔氧化鋅(AZOY)/矽異質接面太陽能電池之製作方法及其效率提升之方式。首先以直流磁控濺鍍技術濺鍍含鋁和釔成份之氧化鋅(ZnO:2wt.%Al2O3 and 0.33wt.% Y2O3)陶瓷靶材，並將具有摻鋁和釔氧化鋅(AZOY)薄膜沉積在玻璃基材上，藉由製程參數的調變與薄膜特性分析之後，獲得具有最優化光電特性之摻鋁和釔氧化鋅(AZOY)薄膜的一組製程參數，爾後，採用此最優化的製程參數，在矽(Si)基材上沉積摻鋁和釔氧化鋅(AZOY)薄膜。藉此，便形成簡單的摻鋁和釔氧化鋅(AZOY)/矽異質接面太陽能電池。最後，為了更進一步提高摻鋁和釔氧化鋅(AZOY)/矽異質接面太陽能電池的光能量吸收，利用稀釋之磷酸溶液(濃度為0.5 M)，以不同的時間蝕刻摻鋁和釔氧化鋅(AZOY)薄膜，藉此改變其表面結構，以提高摻鋁和釔氧化鋅(AZOY)/矽異質接面太陽能電池之轉換效率。􀀇 􀀍 􀀎 􀁌 􀁍 􀁎 􀁏 􀀣 􀁐 􀀧 􀀨 􀀩 􀀪 􀀫 􀀬 􀀭 􀀮 􀀯 􀀰 􀀱 􀀲 􀀳 􀀴 􀀵 􀀶 􀀷 􀀸 􀀹 􀀺 􀀻 􀀼 􀀽 􀀾 􀀿 􀁀 􀁁 􀁂 􀁃 􀁄 􀁅 􀀹 􀀼 􀁆 􀁑 􀀿 􀁒 􀁋 􀁌 􀁓 􀁔 􀁕 􀁑 􀁓 􀂑 􀂒 􀁵 􀂓 􀂔 􀂕 􀂖 􀀧 􀀨 􀀩 􀀪 􀀫 􀀬 􀀭 􀁦 􀁧 􀁑 􀁰 􀂆 􀂗 􀁷 􀀿 􀂘 􀀳 􀂙 􀂚 􀁑 􀁓 􀁄 􀂛 􀀧 􀀨 􀀩 􀀪 􀀫 􀀬 􀀭 􀀮 􀀯 􀀰 􀀱 􀀲 􀀳 􀀴 􀀵 􀀶 􀀷 􀀸 􀀹 􀁀 􀁁 􀁂 􀁃 􀂜 The present invention relates to a process for manufacture of a solar cell with a heterojunction of AZOY and silicon and a process for promotion of transformation conversion thereof, which particularly takes advantage of the direct current magnetron sputtering technique to prepare a ceramic sputtering target containing components of aluminum and yttrium and then deposit a AZOY thin film on a glass subatrate. After modulation of parameters during the process and analysis of characteristics of AZOY thin film, a set of process parameters for AZOY thin film having optimum photoelectric characteristics can be obtained. Futher, the AZOY yhin film can be deposited on a silicon substrates with use of the optimum process parameter, so that it is simple to form a solar cell with a heterojunction of AZOY and silicon. A diluted acid liquid is used to etch the AZOY thin film at different times to change its surface structure for promotion of its transformation conversion.

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