固定型與非固定型之三維立體管/環結構結合圖案化薄膜之製備

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

104105887

專利證號

I 585201

專利獲證名稱

固定型與非固定型之三維立體管/環結構結合圖案化薄膜之製備

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2017/06/01

技術說明

本發明係揭露一種固定型與非固定型之立體管/環狀結構結合圖案化薄膜之製備方法，其製備方法至少提供一基板，於該基板上進行下列步驟：於該基板上覆蓋一支持薄膜層；於該支持薄膜層上定義出一微圖案；將一或多層材料沉積於該微圖案上；於該支持薄膜層之至少一端開設一通道；以及於一溫度範圍內移除該基板，因該支持薄膜層與該沉積之材料層之熱膨脹係數不同，俾使該支持薄膜層與該沉積材料朝熱膨脹係數大的一側捲曲成一管/環狀薄膜。 The present invention discloses fabrication methods of tethered or untethered 3D Rolled-up Tube/Ring with Patterned Thin Films. In the fabrication method, at least a substrate is included and a supported thin film layer is covered the substrate. Nano/micropattern is defined on the supported thin film layer. One to more layers of deposited thin film material are given to generate nano/micropatterned thin film on supported thin film layer. One end of the thin film layer is opened with a channel. The substrate is removed within a temperature range. There is a large difference in thermal expansion coefficient between the supported thin film layer and the deposited material layer. The films curled toward either the supported thin film layer or deposited thin film that with larger coefficient of thermal expansion. Untethered 3D structure follow the similar process but include an additional to remove the supported thin film layer from the substrate.

備註

本部(收文號1100063323)同意該校110年10月19日清智財字第1109006858號函申請終止維護專利(清大)

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