水氣阻障層合體

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

106128526

專利證號

I 629180

專利獲證名稱

水氣阻障層合體

專利所屬機關 (申請機關)

國立臺北科技大學

獲證日期

2018/07/11

技術說明

可撓式有機電子裝置如染料敏化太陽能電池(DSSCs)、有機太陽能電池(OPV)及有機發光二極體(OLED)已成為現代科技趨勢，為延長其元件壽命，需使用優異的水氣阻隔保護材料來防止內部有機材料劣化及陰極金屬老化。本研究以氧化鋁與有機-無機改性矽烷(Ormosils)堆疊於聚對苯二甲酸乙二酯(PET)上，設計一系列高光穿透阻水氣複合膜。氧化鋁層為主要的氣體阻隔層，本文以反應式脈衝磁控濺鍍技術及射頻磁控濺鍍技術沉積氧化鋁薄膜，藉由改變製程參數，包含反應氣體例、濺射功率、薄膜厚度等，以製得緻密的氧化鋁薄膜，並深入分析各特性相互關係。最佳條件下單層氧化鋁可由原先PET基材的水氣滲透率5.0734 g/m 2 ·day大幅下降至0.0445g/m 2 ·day。進一步研究PET基材發現其表面遍布缺陷(微米)與粗糙(奈米)，導致薄膜無法有效覆蓋，顯著影響阻水氣效果。為解決此問題，本實驗以溶膠凝膠法(sol-gel)合成有機-無機改性矽 烷(Ormosils)塗佈修飾PET表面。最後經由設計其最佳化複合膜膜組，阻水氣效果達<5 x10 - 5 g/m 2 ·day，平均光穿透度90%(原PET為89.10%)。 Development of a cost effective flexible organic electronic devices, such as dye-sensitized solar cells(DSSCs), organic photovoltaic (OPV) and organic light-emitting diodes (OLED) are the currentinterests for many research groups in the researches and developments of the flexible consumerelectronics. One of the critical components for preparing for those devices is the barrier film whichprevents the water vapor erosion of the components; thus, it prolongs the life time of the devices. In thereport, we developed a multilayered barrier film which composes of staking layers of aluminum oxide and organic-inorganic hybrid materials (Ormosils) on flexible transparent PET film. The main barrier ofaluminum oxide layer, was deposited through either pulsed DC magnetron sputtering or RF magnetronsputtering. The use of reactive gas ratios, intensities of the power, and thickness of deposition on thefilm properties were implemented to optimize the high barrier performance of thin films.

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