振動位移與振動頻率決定方法與其裝置METHOD FOR DETERMINING VUBRATION DISPLACEMENT AND VIBRATING FREQUENCY AND APPARATUS USING THE SAME

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

12/478,847

專利證號

US 8,018,601 B2

專利獲證名稱

振動位移與振動頻率決定方法與其裝置METHOD FOR DETERMINING VUBRATION DISPLACEMENT AND VIBRATING FREQUENCY AND APPARATUS USING THE SAME

專利所屬機關 (申請機關)

國立臺北科技大學

獲證日期

2011/09/13

技術說明

一種干涉振動位移決定方法，透過具有相位差之高同調干涉圖案上之光訊號，取得待測物與干涉裝置上之一參考面之間之位置偏移量。利用前述之方法重複進行複數次的量測之後，建立出偏移量與時間之關係序列，再根據該序列決定出該待測物之振動頻率。在另一實施例中，揭露一干涉裝置，其係利用光學干涉條紋判定的技術，即時計算出待測物與干涉裝置上之一參考面之相對位置，進而即時補償干涉裝置受到振動時之影響，以得到待測物表面形貌與振動頻率。 A method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interference pattern corresponding to a sample is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the sample. In one embodiment, a series of the shifting displacements with respect to a time interval is measured for determining the vibrating frequency of the sample by spectrum analysis. Meanwhile, an interferometric apparatus also be disclosed for calculating the relative position between the sample and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the sample itself so as to obtain the surface profile and vibration frequency of the sample.

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