晶圓缺角自動對齊裝置

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110134428

專利證號

I 799990

專利獲證名稱

晶圓缺角自動對齊裝置

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2023/04/21

技術說明

一種晶圓缺角自動對齊裝置，包括本體、晶圓旋轉機構及晶圓定位機構。本體具有晶舟放置部。晶圓旋轉機構設置於本體上並且包括轉軸，轉軸延伸通過晶舟放置部，轉軸的軸線與本體之間的夾角的角度大於0且小於90。晶圓定位機構設置於本體上並且包括定位件，定位件延伸通過晶舟放置部，定位件的軸線平行於轉軸的軸線。藉此，本發明能夠藉由傾斜的轉軸和定位件將複數片晶圓呈現階梯狀分布，防止各晶圓的刻號被其他晶圓擋住，還可達成旋轉晶圓、缺角對齊及刻號辨識等功效。 A wafer notch automated aligner includes a main body, a wafer rotation mechanism, and a wafer positioning mechanism. The main body has a wafer boatplacing portion. The wafer rotation mechanism is disposed on the main body and includes a rotor, the rotor extends through the wafer boat placing portion, and an angle between an axis of the rotor and the main body is greater than 0° and smaller than 90°. The wafer positioning mechanism is disposed on the main body and includes a positioning member, the positioning member extends through the wafer boat placing portion, and an axis of the positioning member is parallel to the axis of the rotor. Such that, a plurality of wafers are arranged in a ladder shape by the inclined rotor and the inclined positioning member, so that a wafer identification of each wafer cannot be hid by another wafer in front of each wafer, and the wafer notch automated aligner can rotate the wafer, align the notches , and identify the wafer identifications.

備註

連絡單位 (專責單位/部門名稱)

智財技轉組

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03-5715131-62219

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