發明
中華民國
103124023
I 530701
三維積體電路測試系統及其方法
國立成功大學
2016/04/21
本發明係有關於一種三維積體電路測試系統及其方法,包括有一測試介面與解碼單元、一控制訊號產生單元,以及一測試流程執行單元;測試介面與解碼單元接收三維積體電路測試系統所需之測試向量,控制訊號產生單元可於特定測試模式下產生三維積體電路測試所需之控制訊號,其中特定測試模式可為堆疊前測試模式、矽穿孔測試模式,以及堆疊後測試模式等,測試流程執行單元則傳送測試向量至三維積體電路,並接收三維積體電路回傳之測試結果,以與預期測試結果進行比對;藉此,本發明可有效達到降低三維積體電路之測試成本並提高其測試效率。 The invention relates to a three-dimensional integrated circuit testing system and a method thereof. It comprises a test interface and decoding unit, a control signal generating unit and a test process execution unit. The test interface and decoding unit are used for receiving test vectors required by the three-dimensional integrated circuit testing system. The control signal generating unit is used for generating control signals required for testing the three-dimensional integrated circuit under to specific test modes, wherein the specific test modes could be pre-bond test mode, TSV test mode, post-bond test mode, etc. The test process execution unit is used for transmitting the test vectors to the three-dimensional integrated circuit and receiving test results returned from the three-dimensional integrated circuit so that the test results can be compared with the expected test results.
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