轉印頭結構以及使用該轉印頭結構之轉印系統

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

110147936

專利證號

I 792792

專利獲證名稱

轉印頭結構以及使用該轉印頭結構之轉印系統

專利所屬機關 (申請機關)

國立陽明交通大學

獲證日期

2023/02/11

技術說明

本發明揭露一種轉印頭結構，係包括基板以及設於該基板上之轉印頭，該轉印頭為由平頂面及自該平頂面向該基板傾斜形成之複數斜側面組成之錐台 ，以使該轉印頭結構具有透鏡之放大效果，藉以改善光學檢視能力；另外，本發明復提供一種利用前述之轉印頭結構的轉印系統，係於面對較微小尺寸之待移轉物時，能降低光學顯微器對物鏡之倍率的要求，進而避免拾取或轉印時因微小尺寸所導致之對準問題。 The present invention is a transfer head structure, which includes a substrate and a transfer head arranged on the substrate. The transfer head is a frustum composed of a flat top surface and a plurality of sloping surfaces formed obliquely from the flat top surface to the substrate, so that the transfer head structure has the magnification effect that likes lens, thereby improving the optical inspection ability. In addition, the present invention also provides a transfer system using the aforementioned transfer head structure, which can reduce the requirement of the optical microscope for the magnification of the objective lens when facing the object to be transferred with a relatively small size, thereby avoiding the alignment problem caused by the tiny size during pick-up or transfer.

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