單片式具有多種對波長能量調變功能濾光片之曝光機及光譜調整方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

105140309

專利證號

I 591387

專利獲證名稱

單片式具有多種對波長能量調變功能濾光片之曝光機及光譜調整方法

專利所屬機關 (申請機關)

財團法人國家實驗研究院

獲證日期

2017/07/11

技術說明

本計畫為延續計畫，其目的為了解決前期產學計畫所 遇到的非預期問題，根據實機測試結果並與廠商詳細討論，提出開發 3 種廣波域的具吸收特性的 ND Filter 可優化廠商曝光機光源，並預期此開發之設備將會銷售至達○公司與奇○材料實業，整合上游 設備商與下游使用廠商以提升國內相關產業鏈本土化的能量。透過吸收型廣波域的 ND Filter 可以有 效地降低多次反射所造成的疊影問題，提升本土曝光機的技術能量並藉此設備縮短光阻材料的開發 時程，減少實驗室製程與產線製程的轉換時間，增加國內光阻廠與面板廠的國際競爭力。 This project is the continuation of project which aims to solve unanticipated problems encountered in the previously planned. According to the real machine test results and detailed discussions with manufacturers, offered to develop 3-broadband absorption ND filters. ND Filter can be optimization exposure light source, and the expected development of this equipment will be sold to the company with the D○XIN and CH○MEI material, the integration of upstream and downstream equipment manufacturers to use domestic manufacturers to enhance the localization of supply-chain. ND filters are used for developing new photoresist materials as broadband ND filters could effectively reduce the development schedule of photoresist materials and enhance the international competitiveness of domestic photoresist manufacturers.

備註

連絡單位 (專責單位/部門名稱)

國研院技術移轉中心

連絡電話

02-66300686

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