DEVICE AND METHOD FOR MONITORING SURFACE CONDITION OF CONTACT SURFACE OF DETECTED OBJECT

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

17/113,109

專利證號

US 11,634,319 B2

專利獲證名稱

DEVICE AND METHOD FOR MONITORING SURFACE CONDITION OF CONTACT SURFACE OF DETECTED OBJECT

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2023/04/25

技術說明

透過非線性掃頻技術，推估微機電慣性感測器表面(塗層)狀況，提供塗層均勻度及元件可靠度的參照。目前已有初步實驗結果證實在金屬及其氧化物的接觸表面材料下，非線性頻率響應表現出顯著變化。 Via nonlinear frequency sweeping, this technique can estimate the surface coating condition in MEMS inertial sensors and provide the reference for the uniformity of surface coating and component reliability. The preliminary measured results shows that the contact surface of metal and its metal oxide present distinct frequency responses.

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