射頻反射式掃描穿隧顯微鏡RADIO-FREQUENCY REFLECTOMETRY SCANNING TUNNELING MICROSCOPE

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

14/037,024

專利證號

US 8,863,311 B1

專利獲證名稱

射頻反射式掃描穿隧顯微鏡RADIO-FREQUENCY REFLECTOMETRY SCANNING TUNNELING MICROSCOPE

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2014/10/14

技術說明

一種射頻反射式掃描穿隧顯微鏡，具有一與一待測樣品間隔且相對設置的探針，用以掃描該待測樣品的表面樣貌，並包含：一射頻共振電路，其包括一電感以及與電感的一端並聯的一電容、一電阻及一穿隧電阻，其中該穿隧電阻形成於待測樣品與探針之間，一與該電感的另一端電耦接的方向耦合器，一產生一射頻信號並經由該方向耦合器輸出至該射頻共振電路的射頻信號源，以及一射頻信號測量系統，其接收該射頻共振電路經由該方向耦合器傳來的一射頻反射信號，以根據該射頻反射信號反饋控制該探針，並產生一與該待測樣品的表面樣貌有關的掃描結果。 A radio-frequency(RF) reflectometry scanning tunneling microscope, with a scanning tip placed opposite to a sample surface for which morphology and features are to be measured, and comprises a RF resonance circuit which includes an inductor and a capacitor, a resistor and a tunneling resistor which connect in parallel to one end of the inductor, wherein the tunneling resistor is formed between the sample surface and the tip, a directional coupler which electrically couples to the other end of the inductor, a RF signal source which sends a RF signal to the RF resonance circuit through the directional coupler, and a RF signal measuring system which receives the reflected RF signal from the RF resonance circuit through the directional coupler and feedback controls the tip motion according to the reflected RF signal, and generates a scanning result reflecting the features of the sample surface to be measured.

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