複合式光開關裝置

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

097136255

專利證號

I 418847

專利獲證名稱

複合式光開關裝置

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2013/12/11

技術說明

本發明專利旨在發展一擁有高精密、低成本之複合式光開關系統。此複合式光開關系統，乃由高精密度之矽基微鏡面陣列，與擁有雙穩態特性之電磁式小型致動器陣列所組合而成。矽基微鏡面陣列，包含垂直鏡面、懸臂樑、光路凹槽等，乃利用微機電技術中的濕式非等向性蝕刻技術所製造。電磁式小型致動器陣列，則由擁有雙穩態特性之致動器與L型推桿所組成。當L型推桿未與懸臂樑接觸時，由於懸臂樑本身為純矽結構並無任何的應力，所以鏡面可以精確地反射光訊號，降低光學損耗。當L型推桿將懸臂樑向上頂出時，鏡面可因此而離開光路徑，使得光訊號直通而過。因此，本文所發展之複合式光開關系統，擁有低成本、高精準度、元件組裝容易、低耗能及高製造良率之優勢。 A highly accurate but low-cost hybrid optical switch is presented. This hybrid optical switch is composed of a MEMS-based silicon micro-mirror array and a mini-actuator array. The silicon micro-mirror array, which includes vertical mirrors, cantilevers, and trenches for passing light beams, are fabricated by using simple KOH etching process. The wet anisotropic silicon etching technique that is employed in this work greatly reduces the complexity of the fabrication process and thus gives higher fabrication yield. The mini-actuator array consists of commercially-available electromagnetic bi-stable actuators and L-shape arms. When the L-shape arm does not contact the cantilever, the mirror that is under zero external force can precisely reflect the light beam. When the L-shape arm pushes up the mirror, the light beam can pass under the mirror. The main advantages of this proposed design include high precision, easy for fiber alignment, high fabrication yield as well as low cost.

備註

本部(收文號1100033534)同意該校110年6月9日校研發字第1100036312號函申請終止維護專利(台大)

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