線性壓電馬達及其滑台傳動系統

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

106120914

專利證號

I 647901

專利獲證名稱

線性壓電馬達及其滑台傳動系統

專利所屬機關 (申請機關)

中原大學

獲證日期

2019/01/11

技術說明

本計畫「性能優化之行進波馬達及線性馬達載台系統研製」為二年期研究計畫提案。計畫目標為研製一種新型的行進波式超音波壓電馬達，相較於以往之壓 電線性馬達，其具有性能良好且穩定而製程簡化之優點。此新型之行進波壓電馬達經適當修改可結合線性滑軌完成一具嶄新之壓電式線性馬達載台系統(piezoelectric linear motor carriage system) 。系統功能之指標為速度高於100mm/sec，在此速度條件下之定位解析度小於100nm。第一年研製行進波式壓電線性馬達之主要項目包括定子設計之壓電陶瓷元件、行進波、櫛齒機構、定子與滑台之接觸面等，以及控制方法設計之控制模式與伺服控制法則，以及包括感測器、壓電馬達系統之機械特性與軌跡定位之系統功能測試。第二年研製壓電式線性馬達載台系統之主要項目包括修改設計第一年開發之行進波壓電馬達並予以輕量化、結合線性滑軌與行進波壓電馬達之設計、測試與評估兩種線性馬達載台系統之優缺點、設計製作專用之驅動器及控制器之單元體，並將控制法則設計植入於微處理器，進行系統整合控制測試，驗證系統功能。 This proposed project entitled “Development of a Traveling-wave Motor and a Piezoelectric Linear Motor Carriage System” is a two-year project proposed to MOST. The objective is to develop a new type of traveling-wave linear motor, which has the advantages of better performance and steadiness as well as simplified manufacturing process. Moreover, modification of the developed traveling-wave linear motor in combination with a linear guideway, a new piezoelectric linear motor carriage system is established. The system performance indices are of resolution 100nm at the speed of 100 mm/sec. Development of a traveling-wave piezoelectric motor is the main objective in the first year. The research focuses on the design of stator including piezoelectric actuator design, traveling wave design and analysis, gear teeth mechanism design, analysis of contact between the stator and carriage; and the design of control system including control mode design as well as serve control algorithm; the design of system function testing including sensor selection, motor testing, trajectory planning for positioning control testing. Development of a linear motor carriage system is the primary task in the second year. The research works includes modification of the traveling-wave piezoelectric motor for small size purpose, design of an appropriate linear guideway for integration with the traveling-wave piezoelectric motor as well as evaluation of two types of linear motor carriage system, driving circuitry design and controller design, control method design and implementation on the micro processer, and system integration and performance evaluation.

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