COMPACT BEARING SYSTEM AND MACHINE STAGE SYSTEM EQUIPPING THE SAME

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

15/210,902

專利證號

US 10,077,806

專利獲證名稱

COMPACT BEARING SYSTEM AND MACHINE STAGE SYSTEM EQUIPPING THE SAME

專利所屬機關 (申請機關)

國立清華大學

獲證日期

2018/09/18

技術說明

本發明係提供一種軸承系統，其係具有改變負載力功能及可於一滑軌上進行精密運動。軸承系統包含一軸承本體、一流體、一軸承封件以及一加壓裝置。軸承本體包含一液壓腔，其一開口面對滑軌之表面。流體填充於液壓腔，且流體於開口處接觸滑軌之表面。軸承封件與滑軌之表面接觸，且將軸承本體與滑軌之表面間的間隙密封，以使流體侷限於液壓腔內，並使流體自液壓腔洩漏之洩漏量限制於一預設之最小程度。加壓裝置透過一微通道對流體加壓，且流體承載軸承系統之大部份負載。藉此，本發明之軸承系統能同時達到精密作動及維持精簡架構。 A compact bearing system is capable of variable load carrying capability and precision motion on a guideway. The compact bearing system includes a bearing body, a fluid medium, a sealing bearing member and a pressurizing action means. The bearing body includes an internal pocket with an open side facing a surface of said guideway. The fluid medium is contained inside said internal pocket and is contacted with said surface of said guideway on said open side. The sealing bearing member is contacted with said surface of said guideway and seals a clearance between said bearing body and said surface of said guideway to limit leakage of said fluid medium. The pressurizing actuation means pressurizes the confined fluid medium through a small passage by the principle of connected vessels, and the pressurized fluid medium carrying main portion of load carried on said compact bearing system.

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