多功能矽積體光學晶片應用於光纖感測器Practical Silicon Photonic Multi-function Integrated-Optic Chip for Fiber Sensor Applications

專利類型

發明

專利國別 (專利申請國家)

美國

專利申請案號

13/941,065

專利證號

US 8,805,135 B2

專利獲證名稱

多功能矽積體光學晶片應用於光纖感測器Practical Silicon Photonic Multi-function Integrated-Optic Chip for Fiber Sensor Applications

專利所屬機關 (申請機關)

財團法人國家實驗研究院

獲證日期

2014/08/12

技術說明

本發明以矽積體光學晶片為主軸，取代傳統的鈮酸鋰多功能積體光學元件，並整合(1)獨特創新的「極化分光耦合器」偏振波導架構，將由外部進入矽積體光波導的光做極化區分，使其TE偏振方向的光耦合至矽波導內,而TM偏振方向的光則依賴不同的介電材料(SiC)的波導導出，(2)獨特創新的「兩段式漸變波導區」，銜接偏振波導TE偏振方向的光與多模干涉分光器(MMI coupler)耦合，以減少傳輸損耗。之後利用多模干涉分光器將進入的TE偏振光分為兩道分叉，分光器可為1×2 或 2×2架構，及(3)分叉兩端各有一個相位調制器，可利用相位調制器中不同的物理機制，如plasma dispersion、 electro-optics、 thermo-optics、或 photo-elastic等方法來改變光在波導內行進的相位調變。 This patent disclosure is based on silicon instead of LiNbO3, waveguide chip. The disclosed silicon-based multi-function integrated-optic chip comprises of unique design and fabrication features onto it. First, a unique polarization-diversity coupler is designed and fabricated to couple the external light into the silicon waveguide structure. Here TE mode is guided into a silicon slab waveguide, but TM mode is confined and diverted 90 degree in a silicon carbide structure till the chip edges for TM-mode suppression. Second, a unique two-step (vertical and lateral) taper waveguide region is designed and fabricated to bridge the polarization-diversity coupler output with the input of a multi-mode interferometer (MMI) splitter for power loss reduction. In this configuration, MMI maybe a 1×2 or 2×2 structure to divide the input TE mode into a 50/50 splitting ratio output to form a Y-junction.

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