以粒子相轉移法回收切割矽泥中的矽與碳化矽粉

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

098115605

專利證號

I 392647

專利獲證名稱

以粒子相轉移法回收切割矽泥中的矽與碳化矽粉

專利所屬機關 (申請機關)

國立臺灣大學

獲證日期

2013/04/11

技術說明

本案係提供一種回收晶棒切割矽泥中矽與碳化矽粉的方法，包括下列步驟：(a)由切割矽晶棒後的矽泥中獲得第一樣品；(b)視第一樣品中矽含量的多寡而決定採用二或三階段之粒子相轉移法，若矽含量高於碳化矽；(c)依序混合第一樣品、水及第一油類，獲得第一混合物；(d)靜置第一混合物，將分層後的第一水層加以離心並乾燥，獲得第一產物；(e)再依序混合第一產物、水及第二油類，獲得第二混合物；(f)靜置第二混合物，將分層後的第二水層加以離心並乾燥，獲得第二產物，第二產物即為高純度的矽粉且有極高之產率；(g)將第一油層離心及乾燥，獲得第三產物主要為碳化矽粉。 A method for recovering silicon powder from a kerf loss slurry is provided in the present invention. In the first stage of this particle phase-transfer method, the first sample, containing silicon and silicon carbide, is prepared from a kerf loss slurry with the concentration of silicon being higher than that of silicon carbide, and then water and oil are added to the first sample forming the first mixture, which is settled to form a water and an oil phase. The first product is obtained by centrifugation from the water phase. In the second stage, the first product is mixed with water and another oil to form the second mixture which is also separated thereby to obtain a second product from the water phase. The second product is the preferred silicon powder. Besides, the third product, i.e. recovered silicon carbide, also is obtained by centrifugation from the oil phase of the first stage.

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