非接觸式３Ｄ全平面位置對準法NON-CONTACTING ALIGNING METHOD FOR PLANES IN THREEDIMENSIONAL ENVIRONMENT

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

099103058

專利證號

I 405948

專利獲證名稱

非接觸式３Ｄ全平面位置對準法NON-CONTACTING ALIGNING METHOD FOR PLANES IN THREEDIMENSIONAL ENVIRONMENT

專利所屬機關 (申請機關)

國立中興大學

獲證日期

2013/08/21

技術說明

一種非接觸式3D全平面位置對準法，包括：將一條紋光以預定入射角投影於疊對的一可透光的第一物件和一不透光的第二物件；以及以該條紋光之入射角的正切三角函數計算出該第一物件和該第二物件的垂直相對距離。 本方法利用原有水平(xy平面)對位影像監視器，外加斜向輔助光，以及在光罩表面做輕微霧化處理或部分反射鍍模處理，即可在原有水平監視系統，增加垂直方向(z軸)的檢測，不需要另外增加另一組影像系統。而且垂直方向的檢測能力接近水平方向的檢測能力，垂直方向的解析度可達水平方向60％。 A non-contacting aligning method for planes in a three-dimensional environment is disclosed. The method includes: projecting a light beam in a predetermined incident angle onto a transparent first object and an opaque second object that are facing each other; and calculating a distance between the first and second objects basing on the tangent trigonometric function of the incident angle of the light beam. The means takes advantage of the image monitor of horizontal leveling, a x-y plane, in addition to obliquing the supplementary light and slightly nebulizing the surface of photomasks, or partly dealing with the partially reflective coating. Therefore, in the system of horizontal monitor added the examination of vertical direction, a z axis, there is no need adding another image system. Besides, the capability of the examination of vertical direction approaches the horizontal one. The resolution of vertical direction reaches sixty percent of the horizontal direction.

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