六角柱體微型感測探針及其製法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

103128924

專利證號

I 584779

專利獲證名稱

六角柱體微型感測探針及其製法

專利所屬機關 (申請機關)

國立交通大學

獲證日期

2017/06/01

技術說明

本發明之六角柱體體矽基微形探針，該探針是由一片金屬基電阻式溫度感測探針和氧化銥/氯化銀酸鹼值感測探針覆合壓焊而成，可同時感測溫度及酸鹼值。由於該探針之結構是由兩片傳統矽基探針貼合而成為針狀結構， 其於應力測試實驗結果顯示此覆合探針可以達到3牛頓壓應力，足以可以輕易地穿刺人體和動物的心肌或肌肉組織以監測心肌狀態或者是感測肉類食品的新鮮度。由於該探針與傳統半導體製造製程技術相容，元件效能與製造成本將可最優化。 Micromachined sensing probes have been developed and widely used for biomedical purpose. These probes can apply many functions ranging from micro heating to fluid delivery. There is still a technical challenge in the development robust and slender needle that can not only penetrates the musculature of human without causing serious wound but also monitors the temperature and pH value simultaneously in such a narrow needle. Therefore, this invention will provide a solution to do the real-time surveillance of tissue condition, a hexagonal-type silicon micro sensing probe with thermal sensing coil and pH sensing electrode. The key invention of this patent is to enhance the robustness of the probe based on the assembly of two typical micromachined silicon probes, and all kinds of sensors can be well distributed in the shank of the probe in either one side or both side of the assembled probe.

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