奈米感測器之製造方法

專利類型

發明

專利國別 (專利申請國家)

中華民國

專利申請案號

098143996

專利證號

I 399337

專利獲證名稱

奈米感測器之製造方法

專利所屬機關 (申請機關)

國立成功大學

獲證日期

2013/06/21

技術說明

本專利提供製作低成本奈米感測器之方法，藉由奈米材料將溫度或壓力之物理量轉變成為電訊號。製作方法藉由奈米材料之製備成為液態或固態，將其於低溫狀態下製作出所需之感測器形狀於基板之上，由於製程溫度低，基板可使用硬式或軟式材料，奈米材料之成型方法可藉由旋塗、噴撒、線性塗佈、微波、網印等，再進行結構之製作及封裝，以完成感測器之製作。由於製程溫度低具製程容易，因此可將感測器製作於塑膠等之軟性低價位材質上，因此極具未來商品化之潛力。 This patent provides the methods of fabrication process in low-cost nanosensors. The physical quantity of temperature or pressure can translate to electric signal by nanomaterial. For the fabrication process, the nanomaterial can be prepared to liquid or solid state, and patterned for the shape of sensor on the substrate. Both rigid and flexible material can be used for substrate due to the low temperature fabrication process. In order to form the shape of sensors structure, the nanomaterial can be coated on the substrate by spin-coating, spray, linear coating, microwave, screen printing. It’s all low cost fabrication process. After the nanomaterial fabricated on the substrate, the sensor structure and package should made for finished sensor. Due to the low temperature fabrication process, both temperature and pressure sensor can be made on low cost material substrate. Therefore, it has the potential of becoming commercialization in the future.

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